Microelectromechanical Components for Articulated Microrobots

We propose to create a class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram. We have created rigid links, mechanical couplings, and large-force, large-displacement micromotors. Hollow triangular beams made from rotated microhinged polysilicon plates can withstand axial loads of up to 2.3 gm. Mechanical couplings are used to rotate folded structures off the substrate with less than 2μN of force. Linear electrostatic stepper motors with an estimated force of 6.5μN at 35V and a travel of 40μm have also been demonstrated.